Applications
- Annealing
- Sintering
- Diffusion
- LPCVD
- Oxidation
- Glass-to-metal sealing
MATERIALS
- Ceramics
- Glass
- III - V
- II - VI
- Sapphiire
- Superconductors
- GaN
- SiC
- Metal
- Quartz
- Silicon
Tubestar: Batch-Type Horizontal Furnace
ECM Tubestar is the compact batch-type tubular furnace from ECM Lab Solutions. The key characteristics of this furnace line are:
- Precise thermo-chemical treatments combined with industrial process control
- Integration modularity
- User-friendly interface
Each populated chamber can be independently configured and operated in a large range of atmospheric, sub-atmospheric or low pressure processes. The Tubestar furnace can also handle multiple gases and liquid precursors with a temperature range from 200°C to 1300°C. Its modular design allows to meet a large range of clean thermal treatments for R&D and small production facilities.
Benefits
- Primary vacuum pump & Secondary vacuum pump
- Atmospheric configuration (reduced, low pressure or ultra-high vaccum)
- Wet oxidation
- By-product treatment systems
- Turbomolecular pumping assembly
- Water cooling unit
- Possible robotics and advanced automation integration
Specifications
- Modular and flexible & tiny footprint
- 1 to 4 independent process chambers
- Configurable for 25/50 or 50/100 wafers per chamber
- Manual or automatic boat loading
- Temperature range (up to 1100°c - 1200°c upon request)
- Minimized heat load around the system
- Overall dimensions (L*W*H) 1500*800*1500 mm
- Teflon type, Oil type or Dry Pump
- Compatible with 156X square substrate (PV)
- Spike and profile thermocouple control
- Loading platform, Handling tool
- Multizone heating element
- Atmospheric or vacuum process capability
- Gas Cabinet for up to 13 gases
- Liquid source precursor Cabinet and vaporization
- SEMCO Mycro process Management software